苏州三岩芯电子科技有限公司

Manufacturer:Advanced Energy Model:APEX 5513 Radio Frequency Generator Input Power: ~400V， 3 Phase， PE 50/60 Hz， 15.0 A (or 13.0 if F/R A) Output Frequency: 13.56 MHz， +/- 0.005% Power Output: 5500 W Input Voltage: 400 V nominal， 360-440 VAC， 3 phase， 47 to 63 Hz， with breaker Packaging: Frame Mount (< or = to 5500 W) Serial I/O: Profibus Serial Port 2: default (no secondary serial port) Output Impedance: 50 Ohm Output Connector: 7/16 Connector RF Measurement: Directional Coupler AC Power Input: ODU Connector Water Fitting Threads: default to 3/8 BSP female (metric threads) Custom Configuration: Standard Configurations Harmonics: All full-rated output， -40 dBc forward/load when operated into 50-Ohm non-reactive load Size (Not Shipping): 13.13 cm (H) x 21.59 cm (W) x 38.1cm (D) Water Cooling Temperature: 35°C (95°F) max AE(Advanced Energy)、ENI(MKS)电源维修及销售目录如下： AE(Advanced Energy)维修目录: Ion Beam Drive: ●ID-3500、ID-3501、IT-2500、IT-3500 DC(直流系列): ●MDX Series: MDX 5、MDX 10、MDX 20、MDX 30、MDX-052、MDX 1K、MDX 1.5K、MDX 500、MDX Delta ●MDX II Series: MDX II 15kw(15-120KW) ●PINNACLE Series: Pinnacle 6KW、Pinnacle 12KW、Pinnacle 10KW、Pinnacle 20KW、Pinnacle 8KW、Pinnacle 15KW、PINNACLE 3000 ●PINNACLE PLUS+:Pinnacle Plus+ 5KW、Pinnacle Plus+ Dual output 5KW、Pinnacle Plus+ 10KW ●DIAMOND Series: Pinnacle Diamond 8KW、Pinnacle Diamond 10KW、Pinnacle Diamond 15KW ●MDX-L Series: MDX-L6、MDX-L 6KW Halo、MDX-L12、MDX-L12M、MDX-L12M 650、MDX-L18 ●SPARC Series: Sparc-le 20、Sparc-le V、Sparc VS ●EWave ●DC Pulsing Accessoires : DC PULSAR AC(交流/中频系列): ●PE: PE 1000、PE 2500、PE 3750、PE 5000、PE-10K、PE-20K、PE-30K、PE-1000SG ●PE II：PE II 5KW、PE II 10KW、PE II 60KW ●PDX：PDX 500、PDX 900-2V、PDX 1250、PDX 1400、PDX 2500、PDX 5000、PDX 7.5K、PDX 8000、PDZ 2200、MSD 350W ●PDW 600、PDW 2200 ●PDP 2500、PDP 3500 ●PEP 250、PEP 2500、PEP 5000 ●Dressler LFGS:LFGS 1250A、LFGS:LFGS 1250B、LFGS:LFGS 1250C、LFGS:LFGS 1250D RF（射频系列）： ●RFG：RFG 80、RFG 1250、RFG 1250 HALO、RFG 1251、RFG 3000、RFG 3001、RFG 5500、RFG 2K-2V、 ●RFDS 1250、RFDS 1250-A、RFDS 3000、RFDS 2Kw-2KV ●APEX：Apex 1513、Apex 2027、Apex 3013、Apex 4027、Apex 5513、Apex 7kW/13、Apex 10kW/13、Apex 3513、Apex 10013、Apex 8013 ●Atlas 2、Atlas 1513、Atlas 3013、Atlas 2504、Atlas 2027、Atlas 2012、Atlas 4012、Atlas 5002、Atlas 5012、Atlas 5013、Atlas 5027、Rapid F ●RFX：RFX 600、RFX 600A、RFX 1250、RFX 2500、RFX 5500、RFG-AZX ●RFX II：RFX II 1250、RFX II 3000、RFX II 5500 ●HFG：HFG 2500、HFG 5000、HFG 4M ●HFV：HFV-3K、HFV-5K、HFV-8K、HFV-L 3KW ●Ovation VHF:VHF-2760W、VHF-2060、VHF-2560、VHF-35162 ●ICP Generator:ICP-1KW、ICP-1.5KW、ICP-1.6KW、ICP-2KW ●Dressler HPG:HPG 03300、HPG 13150、HPG 13300、HPG 27300 ●Dressler Cesar: Cesar 0210、Cesar 0220(200v/400v)、Cesar 0225(200v/400v)