2英寸蓝宝石切割片
2英寸蓝宝石研磨片
2英寸蓝宝石清洗封装片
 
单晶晶体质量指标:
 
蓝宝石晶体纯度≥99.996%
蓝宝石晶体内没有散射颗粒、气泡、无颜色、无包裹物、无多晶、无孪生等现象;蓝宝石晶体无小角晶,晶体定向精度小于0.1°
产品规格:
 
Epi-Ready Sapphire Wafer
Diameter
50.8±0.1mm
Thickness
430±10μm
Orientation
C-plane 0.2°to M-axis ± 0.1°
C-plane 0°to A-axis ± 0.1°
Orientation flat
16.0±1mm
Primary flat location
A-axis ± 0.2°
Front side surface
Epi-Ready Polished
Surface Roughness
Ra<0.2nm
Back side surface
0.8—1.2μ
TTV
<10μ
BOW
<10μ
Package
Clean Room,Nitrogen Atmosphere
研 磨 片
Orientation
C-plane 0.2°to M-axis ±0.1°
C-plane 0°to A-axis ± 0.1°
Diameter
50.8 ± 0.1mm
Thickness
0.49 ± 0.05mm
TTV
15um
Warp
15um
Primary Flat
Length
16.0±1.0mm
 
Orientation
A-plane±0.2°
Visual appearance
No cracks,pits,edge chipping